1. Why use white light interferometry? WLI 3D microscope provides: non-contact fast accurate repeatable area topography, including shaping, waviness and roughness 2. Interference objectives 2.1 Michelson (1.5x ~ 5x) low magnification large field of view 2.2 Mirau (10x ~ 100x) medium to high magnification medium to small field of view 2.3 Linnik (any magnification) 3. […]